Overall fab efficiency
- Bonal, Javier
- Ortega, Carlos
- Rios, Luis
- Aparicio, Santiago
- Fernandez, Manuel
- Rosendo, Maria
- Sanchez, Alejandro
- Malvar, Sergio
Proceedings:
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Year of publication: 1996
Pages: 49-52
Type: Conference paper