Ion beam induced chemical vapor deposition for the preparation of thin film oxides
- Leinen, D.
- Fernández, A.
- Espinós, J.P.
- Belderrain, T.R.
- González-Elipe, A.R.
ISSN: 0040-6090
Year of publication: 1994
Volume: 241
Issue: 1-2
Pages: 198-201
Type: Article