Ion beam induced chemical vapor deposition for the preparation of thin film oxides

  1. Leinen, D.
  2. Fernández, A.
  3. Espinós, J.P.
  4. Belderrain, T.R.
  5. González-Elipe, A.R.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 1994

Volume: 241

Issue: 1-2

Pages: 198-201

Type: Article

DOI: 10.1016/0040-6090(94)90425-1 GOOGLE SCHOLAR

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